A pEek on the lab

VTT’s Micro and Nanoelectronic device fabrication facility, Micronova cleanroom is the largest R&D cleanroom in Nordic countries with over 2600 m2 area.

It provides infrastructure for 150 mm and 200 mm wafer processing including i-line stepper, mask-aligners, and high-end 100 keV electron beam lithography tools accompanied by multiple deposition methods (sputtering, evaporation, electroplating, (PE)CVD, (PE)ALD) and reactive plasma etching (metal, oxide, silicon, DRIE), chemical dry etching (HF-vapour, XeF2), ion milling, and wet etching benches.

It has dedicated superconductive device and CMOS fabrication lines with monitored process performance.

The facilities are suitable for from research activities to small volume manufacturing.